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Abstract
Gold micro-mirrors have been formed in silicon in an inverted pyramidal shape. The pyramidal structures are created in the (100) surface of a silicon wafer by anisotropic etching in potassium hydroxide. High quality micro-mirrors are then formed by sputtering gold onto the smooth silicon (111) faces of the pyramids. These mirrors show great promise as high quality optical devices suitable for integration into MOEMS systems.
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APL05_pyramid_micromirror.pdf
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Submitted date: 2 February 2004
Identifiers
Local EPrints ID: 14619
URI: http://eprints.soton.ac.uk/id/eprint/14619
PURE UUID: 2190d634-a1f1-4689-8f92-8f8eca5fd42c
Catalogue record
Date deposited: 18 Feb 2005
Last modified: 17 Mar 2024 03:16
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Contributors
Author:
Z. Moktadir
Author:
G. Vijaya Prakash
Author:
M. Trupke
Author:
E. Koukharenko
Author:
M. Kraft
Author:
J.J. Baumberg
Author:
S. Eriksson
Author:
E.A. Hinds
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