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Effect of bias voltage on microstructure and properties of Ti-doped graphite-like carbon films synthesized by magnetron sputtering

Effect of bias voltage on microstructure and properties of Ti-doped graphite-like carbon films synthesized by magnetron sputtering
Effect of bias voltage on microstructure and properties of Ti-doped graphite-like carbon films synthesized by magnetron sputtering
Ti-doped graphite-like carbon (GLC) films with different microstructures and compositions were fabricated using magnetron sputtering technique. The influence of bias voltages on microstructure, hardness, internal stress, adhesion strength and tribological properties of the as-deposited GLC films were systemically investigated. The results showed that with increasing bias voltage, the graphite-like structure component (sp2 bond) in the GLC films increased, and the films gradually became much smoother and denser. The nanohardness and compressive internal stress increased significantly with the increase of bias voltage up to ?300 V and were constant after ?400 V. GLC films deposited with bias voltages in the range of -300–-400 V exhibited optimum adhesion strength with the substrates. Both the friction coefficients and the wear rates of GLC films in ambient air and water decreased with increasing voltages in the lower bias range (0–-300 V), however, they were constant for higher bias values (beyond ?300 V). In addition, the wear rate of GLC films under water-lubricated condition was significantly higher for voltages below ?300 V but lower at high voltage than that under dry friction condition. The excellent tribological performance of Ti-doped GLC films prepared at higher bias voltages of ?300–-400 V are attributed to their high hardness, tribo-induced lubricating top-layers and planar (2D) graphite-like structure.
0257-8972
793-800
Wang, Yongxin
a7186ae0-fae4-4bb3-80d9-20852ee7ff1d
Wang, Liping
ef5828b8-d874-42db-bb25-713890281af2
Zhang, Guangan
562918cf-f3df-4647-b855-392f10a1dce6
Wang, S.C.
8a390e2d-6552-4c7c-a88f-25bf9d6986a6
Wood, R.J.K.
d9523d31-41a8-459a-8831-70e29ffe8a73
Xue, Qunji
7614cf46-0701-4942-bfcf-3d480aa3537a
Wang, Yongxin
a7186ae0-fae4-4bb3-80d9-20852ee7ff1d
Wang, Liping
ef5828b8-d874-42db-bb25-713890281af2
Zhang, Guangan
562918cf-f3df-4647-b855-392f10a1dce6
Wang, S.C.
8a390e2d-6552-4c7c-a88f-25bf9d6986a6
Wood, R.J.K.
d9523d31-41a8-459a-8831-70e29ffe8a73
Xue, Qunji
7614cf46-0701-4942-bfcf-3d480aa3537a

Wang, Yongxin, Wang, Liping, Zhang, Guangan, Wang, S.C., Wood, R.J.K. and Xue, Qunji (2010) Effect of bias voltage on microstructure and properties of Ti-doped graphite-like carbon films synthesized by magnetron sputtering. Surface and Coatings Technology, 205 (3), 793-800. (doi:10.1016/j.surfcoat.2010.07.112).

Record type: Article

Abstract

Ti-doped graphite-like carbon (GLC) films with different microstructures and compositions were fabricated using magnetron sputtering technique. The influence of bias voltages on microstructure, hardness, internal stress, adhesion strength and tribological properties of the as-deposited GLC films were systemically investigated. The results showed that with increasing bias voltage, the graphite-like structure component (sp2 bond) in the GLC films increased, and the films gradually became much smoother and denser. The nanohardness and compressive internal stress increased significantly with the increase of bias voltage up to ?300 V and were constant after ?400 V. GLC films deposited with bias voltages in the range of -300–-400 V exhibited optimum adhesion strength with the substrates. Both the friction coefficients and the wear rates of GLC films in ambient air and water decreased with increasing voltages in the lower bias range (0–-300 V), however, they were constant for higher bias values (beyond ?300 V). In addition, the wear rate of GLC films under water-lubricated condition was significantly higher for voltages below ?300 V but lower at high voltage than that under dry friction condition. The excellent tribological performance of Ti-doped GLC films prepared at higher bias voltages of ?300–-400 V are attributed to their high hardness, tribo-induced lubricating top-layers and planar (2D) graphite-like structure.

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Published date: 25 October 2010
Organisations: Engineering Mats & Surface Engineerg Gp

Identifiers

Local EPrints ID: 166233
URI: http://eprints.soton.ac.uk/id/eprint/166233
ISSN: 0257-8972
PURE UUID: a2e414b1-b1a3-43f3-86f0-9cb7a4357fc7
ORCID for R.J.K. Wood: ORCID iD orcid.org/0000-0003-0681-9239

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Date deposited: 26 Oct 2010 09:11
Last modified: 14 Mar 2024 02:37

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Contributors

Author: Yongxin Wang
Author: Liping Wang
Author: Guangan Zhang
Author: S.C. Wang
Author: R.J.K. Wood ORCID iD
Author: Qunji Xue

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