Development of a fabrication process for a MEMS component from ultra fine grained alloys


Qiao, Xiao Guang (2010) Development of a fabrication process for a MEMS component from ultra fine grained alloys. Univiersity of Southampton, School of Engineering Sciences, Doctoral Thesis .

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Item Type: Thesis (Doctoral)
Subjects: T Technology > TN Mining engineering. Metallurgy
Divisions: University Structure - Pre August 2011 > School of Engineering Sciences > Engineering Materials & Surface Engineering
ePrint ID: 185091
Date Deposited: 26 May 2011 14:31
Last Modified: 27 Mar 2014 19:40
URI: http://eprints.soton.ac.uk/id/eprint/185091

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