Development of a fabrication process for a MEMS component from ultra fine grained alloys

Qiao, Xiao Guang (2010) Development of a fabrication process for a MEMS component from ultra fine grained alloys. Univiersity of Southampton, School of Engineering Sciences, Doctoral Thesis .

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Item Type:	Thesis (Doctoral)
Subjects:	T Technology > TN Mining engineering. Metallurgy
Divisions:	University Structure - Pre August 2011 > School of Engineering Sciences > Engineering Materials & Surface Engineering
Item ID:	185091
Date Deposited:	26 May 2011 14:31
Last Modified:	30 Jul 2012 23:00
Contributors:	Qiao, Xiao Guang (Author)
Date:	May 2010
Status:	Unpublished
URI:	http://eprints.soton.ac.uk/id/eprint/185091

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