Physical sensitivity of silica micro-cantilevers fabricated using direct UV writing and micromachining
Holmes, Christopher, Carpenter, Lewis G., Rogers, Helen L., Gates, James C. and Smith, Peter G.R. (2011) Physical sensitivity of silica micro-cantilevers fabricated using direct UV writing and micromachining. Journal of Laser Micro/Nanoengineering, 6, (1), 26-30. (doi:10.2961/jlmn.2011.01.0007).
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A silica micro-cantilever with intrinsically defined channel waveguide containing Bragg gratings has been fabricated using a combination of direct UV writing and physical micromachining. Through optically monitoring the response of the Bragg gratings defined within the cantilever, induced stresses can be measured at multiple locations along its length permitting multiplexed physical sensitivity. The fabricated silica cantilever is 61 ?m wide, 41 ?m thick and 3 mm in length. It contains three Bragg gratings and can attain ~70 nm deflection resolution
|Digital Object Identifier (DOI):||doi:10.2961/jlmn.2011.01.0007|
|Subjects:||T Technology > T Technology (General)|
|Divisions:||University Structure - Pre August 2011 > Optoelectronics Research Centre
University Structure - Pre August 2011 > School of Electronics and Computer Science
University Structure - Pre August 2011 > School of Physics and Astronomy
|Date Deposited:||17 Jun 2011 10:59|
|Last Modified:||31 Mar 2016 13:41|
|RDF:||RDF+N-Triples, RDF+N3, RDF+XML, Browse.|
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