Thermal stability of reactive sputtered tungsten oxide coatings
Thermal stability of reactive sputtered tungsten oxide coatings
The thermal stability of different W–O coatings, W100, W90O10, W54O46, W30O70 and W25O75, were studied by in-situ X-ray diffraction at elevated temperatures up to 900 °C. The coatings were deposited by DC reactive magnetron sputtering from a pure tungsten target in an Ar + O2 atmosphere onto Fecralloy alloy. The evolution of the structure of the coatings was studied in both protective and oxidant atmospheres. Three groups of films were identified: (1) W25O75 which showed structural evolution following the W–O phase diagram; (2) amorphous O-deficient WO3 whose structure followed the W–O phase diagram either as WO3 or as its chemical composition depending on annealing in oxidant or protective atmospheres, respectively; and (3) low O-content crystalline films that oxidized from 500 °C
tungsten oxide, reactive sputtering, structural characterization, thermal stability
7076-7082
Parreira, N. M.G.
4562fbe2-1701-42cc-88c3-12aa52c4e1fb
Polcar, T.
c669b663-3ba9-4e7b-9f97-8ef5655ac6d2
Cavaleiro, A.
114e42eb-7255-47ef-834d-0546d56d3171
May 2007
Parreira, N. M.G.
4562fbe2-1701-42cc-88c3-12aa52c4e1fb
Polcar, T.
c669b663-3ba9-4e7b-9f97-8ef5655ac6d2
Cavaleiro, A.
114e42eb-7255-47ef-834d-0546d56d3171
Parreira, N. M.G., Polcar, T. and Cavaleiro, A.
(2007)
Thermal stability of reactive sputtered tungsten oxide coatings.
Surface and Coatings Technology, 201 (16-17), .
(doi:10.1016/j.surfcoat.2007.01.019).
Abstract
The thermal stability of different W–O coatings, W100, W90O10, W54O46, W30O70 and W25O75, were studied by in-situ X-ray diffraction at elevated temperatures up to 900 °C. The coatings were deposited by DC reactive magnetron sputtering from a pure tungsten target in an Ar + O2 atmosphere onto Fecralloy alloy. The evolution of the structure of the coatings was studied in both protective and oxidant atmospheres. Three groups of films were identified: (1) W25O75 which showed structural evolution following the W–O phase diagram; (2) amorphous O-deficient WO3 whose structure followed the W–O phase diagram either as WO3 or as its chemical composition depending on annealing in oxidant or protective atmospheres, respectively; and (3) low O-content crystalline films that oxidized from 500 °C
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e-pub ahead of print date: January 2007
Published date: May 2007
Keywords:
tungsten oxide, reactive sputtering, structural characterization, thermal stability
Organisations:
nCATS Group
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Local EPrints ID: 199761
URI: http://eprints.soton.ac.uk/id/eprint/199761
ISSN: 0257-8972
PURE UUID: 6acd475d-757d-49e8-ab40-b31f65bfc008
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Date deposited: 20 Oct 2011 10:21
Last modified: 15 Mar 2024 03:39
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Author:
N. M.G. Parreira
Author:
A. Cavaleiro
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