Characterization of W–O coatings deposited by magnetron sputtering with reactive gas pulsing
Parreira, N.M.G., Polcar, T. and Cavaleiro, A. (2007) Characterization of W–O coatings deposited by magnetron sputtering with reactive gas pulsing. [in special issue: Proceedings of the Fifth Asian-European International Conference on Plasma Surface Engineering ] Surface and Coatings Technology, 201, (9-11), 5481-5486. (doi:10.1016/j.surfcoat.2006.07.017).
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Description/Abstract
In this study, tungsten oxide coatings were deposited by dc magnetron sputtering onto steel, glass and silica substrates using either a conventional process (constant flow of oxygen) or pulsing of reactive gas (RGP). A square wave regulation signal with different pulsing period (T) and oxygen injection time (ton) was used in RGP. The partial pressure of argon was kept constant for all depositions. Three series of coatings were prepared: two with constant T and increasing ton and one with different T and constant ton/T ratio.
The chemical composition, morphology and structure of these coatings were analyzed by electron probe microanalysis, scanning electron microscope (SEM) and X-ray diffraction, respectively. Preliminary studies have shown a linear relationship between ton/T and the oxygen content ratio (O/W) in the coatings. The structure of these coatings was a mixture of β-W (W3O) and quasi-crystalline WO3 phases in amounts depending of the oxygen content. SEM measurements have shown that a multilayer structure was obtained with increasing pulsing period. The hardness decreased with increasing oxygen content in the coatings
| Item Type: | Article |
|---|---|
| ISSNs: | 0257-8972 (print) 0257-8972 (electronic) |
| Subjects: | T Technology > TA Engineering (General). Civil engineering (General) |
| Divisions: | Faculty of Engineering and the Environment > Engineering Sciences > n CATS Research Group |
| Item ID: | 199769 |
| Date Deposited: | 20 Oct 2011 12:44 |
| Last Modified: | 21 Aug 2012 03:34 |
| Contributors: | Parreira, N.M.G. (Author) Polcar, T. (Author) Cavaleiro, A. (Author) |
| Date: | 26 February 2007 |
| Status: | Published |
| URI: | http://eprints.soton.ac.uk/id/eprint/199769 |
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