Fabrication of a microvalve with piezoelectric actuation
Fabrication of a microvalve with piezoelectric actuation
The fabrication of an active MEMS microvalve driven by integrated bulk single crystal piezoelectric actuators is reported. The valve has a nine-layer structure composed of glass, silicon, and silicon on insulator (SOI) layers assembled by wafer-level fusion bonding and anodic bonding, as well as die-level anodic bonding and eutectic bonding. Valve head strokes as large as 20 ?m were realized through hydraulic amplification of the small stroke of the piezoelectric actuator. A flow rate of 0.21 ml/s was obtained at 1 kHz. The fabrication, bonding and assembly process, as well as some test results are described.
MEMS, microvalve, piezoelectric, hydraulic amplification, multilayer
51-6
Li, H.Q.
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Roberts, D.C.
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Steyn, J.L.
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Turner, K.T.
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Yaglioglu, O.
0be6a095-86de-493f-8675-29aae91470a4
Hagood, N.W.
a6f757dd-7fa8-4290-9ddd-24b324a19582
Spearing, S.M.
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Schmidt, M.A.
70d8449e-0448-4aab-89a5-59d61de752ad
2004
Li, H.Q.
f75bd557-296e-47bb-98de-f302465c59f5
Roberts, D.C.
0c1ea4ed-510b-4357-b273-5f22e5cc71cd
Steyn, J.L.
020ff5b9-4a27-43b0-ba72-fcd3b1bde6d5
Turner, K.T.
a2157f89-3a3c-4712-977f-a42723316d36
Yaglioglu, O.
0be6a095-86de-493f-8675-29aae91470a4
Hagood, N.W.
a6f757dd-7fa8-4290-9ddd-24b324a19582
Spearing, S.M.
9e56a7b3-e0e8-47b1-a6b4-db676ed3c17a
Schmidt, M.A.
70d8449e-0448-4aab-89a5-59d61de752ad
Li, H.Q., Roberts, D.C., Steyn, J.L., Turner, K.T., Yaglioglu, O., Hagood, N.W., Spearing, S.M. and Schmidt, M.A.
(2004)
Fabrication of a microvalve with piezoelectric actuation.
Sensors and Actuators A: Physical, 111 (1), .
(doi:10.1016/j.sna.2003.10.013).
Abstract
The fabrication of an active MEMS microvalve driven by integrated bulk single crystal piezoelectric actuators is reported. The valve has a nine-layer structure composed of glass, silicon, and silicon on insulator (SOI) layers assembled by wafer-level fusion bonding and anodic bonding, as well as die-level anodic bonding and eutectic bonding. Valve head strokes as large as 20 ?m were realized through hydraulic amplification of the small stroke of the piezoelectric actuator. A flow rate of 0.21 ml/s was obtained at 1 kHz. The fabrication, bonding and assembly process, as well as some test results are described.
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Published date: 2004
Additional Information:
Micromechanics section of Sensors and Actuators, based on contributions revised from the Technical Digest of the 16th IEEE International conference on Micro Electro mechanical Systems (MEMS 2003)
Keywords:
MEMS, microvalve, piezoelectric, hydraulic amplification, multilayer
Identifiers
Local EPrints ID: 22777
URI: http://eprints.soton.ac.uk/id/eprint/22777
ISSN: 0924-4247
PURE UUID: bea807b5-5685-40ff-b9c5-c52e2569922c
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Date deposited: 10 Mar 2006
Last modified: 16 Mar 2024 03:37
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Contributors
Author:
H.Q. Li
Author:
D.C. Roberts
Author:
J.L. Steyn
Author:
K.T. Turner
Author:
O. Yaglioglu
Author:
N.W. Hagood
Author:
M.A. Schmidt
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