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Nonlinear buckling of microfabricated thin annular plates

Nonlinear buckling of microfabricated thin annular plates
Nonlinear buckling of microfabricated thin annular plates
Annular plate structures are commonly used in MEMS devices, particularly in pumps and valves. In MEMS applications, large nonlinear deflections are routinely achieved. In this paper, the nonlinear buckling of a thin elastic annular plate under a compressive radial force acting in the plane of the plate is considered. Although the critical loads at which buckling starts can be determined by solving a linear eigenvalue problem, the large deflection behavior of a buckled plate beyond the critical loads can be described by the nonlinear theory proposed by von Kármán. The buckling loads of the annular plate for various boundary conditions are calculated and the post-buckling behaviors are examined. Interestingly, the buckling of an annular plate exhibits a supercritical pitchfork bifurcation. Thus, the post-buckling behavior is stable and will not collapse catastrophically. Several design implications for microfabricated structures, in particular microvalves, are also given.
thin annular plate, post-buckling, supercritical, pitchfork bifurcation, snap-through, MEMS, microvalve
0263-8231
1543-65
Su, Y.H.
5f64d1d5-3f3c-43a2-82e4-99f527fc6eb9
Spearing, S.M.
9e56a7b3-e0e8-47b1-a6b4-db676ed3c17a
Su, Y.H.
5f64d1d5-3f3c-43a2-82e4-99f527fc6eb9
Spearing, S.M.
9e56a7b3-e0e8-47b1-a6b4-db676ed3c17a

Su, Y.H. and Spearing, S.M. (2004) Nonlinear buckling of microfabricated thin annular plates. Thin-Walled Structures, 42 (11), 1543-65. (doi:10.1016/j.tws.2004.05.006).

Record type: Article

Abstract

Annular plate structures are commonly used in MEMS devices, particularly in pumps and valves. In MEMS applications, large nonlinear deflections are routinely achieved. In this paper, the nonlinear buckling of a thin elastic annular plate under a compressive radial force acting in the plane of the plate is considered. Although the critical loads at which buckling starts can be determined by solving a linear eigenvalue problem, the large deflection behavior of a buckled plate beyond the critical loads can be described by the nonlinear theory proposed by von Kármán. The buckling loads of the annular plate for various boundary conditions are calculated and the post-buckling behaviors are examined. Interestingly, the buckling of an annular plate exhibits a supercritical pitchfork bifurcation. Thus, the post-buckling behavior is stable and will not collapse catastrophically. Several design implications for microfabricated structures, in particular microvalves, are also given.

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More information

Published date: 2004
Keywords: thin annular plate, post-buckling, supercritical, pitchfork bifurcation, snap-through, MEMS, microvalve
Organisations: Engineering Mats & Surface Engineerg Gp

Identifiers

Local EPrints ID: 23000
URI: http://eprints.soton.ac.uk/id/eprint/23000
ISSN: 0263-8231
PURE UUID: c206bb66-9f6a-4d25-8e2f-ecfb4ab86e11
ORCID for S.M. Spearing: ORCID iD orcid.org/0000-0002-3059-2014

Catalogue record

Date deposited: 13 Mar 2006
Last modified: 16 Mar 2024 03:37

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Contributors

Author: Y.H. Su
Author: S.M. Spearing ORCID iD

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