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Role of wafer bow and etch patterns in direct wafer bonding

Role of wafer bow and etch patterns in direct wafer bonding
Role of wafer bow and etch patterns in direct wafer bonding
166-174
Turner, K.T.
a2157f89-3a3c-4712-977f-a42723316d36
Spearing, S.M.
9e56a7b3-e0e8-47b1-a6b4-db676ed3c17a
Turner, K.T.
a2157f89-3a3c-4712-977f-a42723316d36
Spearing, S.M.
9e56a7b3-e0e8-47b1-a6b4-db676ed3c17a

Turner, K.T. and Spearing, S.M. (2004) Role of wafer bow and etch patterns in direct wafer bonding. The Seventh International Symposium on Semiconductor Wafer Bonding Science, Technology, and Applications, Paris, France. 26 Apr - 01 May 2003. pp. 166-174 .

Record type: Conference or Workshop Item (Paper)

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More information

Published date: 2004
Additional Information: Abstract No. 1028
Venue - Dates: The Seventh International Symposium on Semiconductor Wafer Bonding Science, Technology, and Applications, Paris, France, 2003-04-26 - 2003-05-01

Identifiers

Local EPrints ID: 23282
URI: http://eprints.soton.ac.uk/id/eprint/23282
PURE UUID: 6fff31f2-485e-4707-ac69-a53f50509484
ORCID for S.M. Spearing: ORCID iD orcid.org/0000-0002-3059-2014

Catalogue record

Date deposited: 14 Mar 2006
Last modified: 12 Dec 2021 03:26

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Contributors

Author: K.T. Turner
Author: S.M. Spearing ORCID iD

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