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Surface morphology studies on carbon nitride films prepared by rf magnetron sputtering

Surface morphology studies on carbon nitride films prepared by rf magnetron sputtering
Surface morphology studies on carbon nitride films prepared by rf magnetron sputtering
0750308125
85-89
Taylor & Francis
Jiang, L.
d735cea7-11a5-464c-92fe-9f04b5f22a9d
Fitzgerald, A.G.
a25c0ee4-638b-47b5-987e-cd8969e29345
Rose, M.J.
bd6c0b8a-1e4e-4ce8-be63-6c0bb1cc59a4
Aindow, M.
Kiely, C.J.
Jiang, L.
d735cea7-11a5-464c-92fe-9f04b5f22a9d
Fitzgerald, A.G.
a25c0ee4-638b-47b5-987e-cd8969e29345
Rose, M.J.
bd6c0b8a-1e4e-4ce8-be63-6c0bb1cc59a4
Aindow, M.
Kiely, C.J.

Jiang, L., Fitzgerald, A.G. and Rose, M.J. (2001) Surface morphology studies on carbon nitride films prepared by rf magnetron sputtering. Aindow, M. and Kiely, C.J. (eds.) In Electron Microscopy and Analysis 2001. vol. 168, Taylor & Francis. pp. 85-89 .

Record type: Conference or Workshop Item (Paper)

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More information

Published date: 2001
Venue - Dates: EMAG2001: Electron Microscopy and Analysis Group Conference, Dundee, UK, 2001-01-01

Identifiers

Local EPrints ID: 23557
URI: http://eprints.soton.ac.uk/id/eprint/23557
ISBN: 0750308125
PURE UUID: b86d7b9e-d556-4ba3-9966-350fb924eb86

Catalogue record

Date deposited: 27 Feb 2007
Last modified: 08 Jan 2022 15:50

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Contributors

Author: L. Jiang
Author: A.G. Fitzgerald
Author: M.J. Rose
Editor: M. Aindow
Editor: C.J. Kiely

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