A multilayer thick-film PZT actuator for MEMs applications

Harris, N. R., Hill, M., Torah, R., Townsend, R., Beeby, S. P., White, N. M. and Ding, J. (2005) A multilayer thick-film PZT actuator for MEMs applications. In, Eurosensors XIX, Barcelona, Spain, 2005.


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This paper describes a technique for replacing the traditional bonded bulk PZT transducer, commonly used in MEMS devices, with a screen printed equivalent. Previously, the piezoelectric activity available from screen printed PZT has been lower than the bulk material, but recent developments in material composition and device structure have allowed screen printed
structures to deliver powers equivalent to bulk devices.

Item Type: Conference or Workshop Item (Paper)
Additional Information: On CD
Related URLs:
Keywords: ultrasonic, MEMS, thick-film
Subjects: T Technology > T Technology (General)
Q Science > Q Science (General)
Divisions : University Structure - Pre August 2011 > School of Engineering Sciences
ePrint ID: 23879
Accepted Date and Publication Date:
Date Deposited: 30 Mar 2006
Last Modified: 31 Mar 2016 11:44
URI: http://eprints.soton.ac.uk/id/eprint/23879

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