Improved control of polysilicon emitter interfacial oxide using a UHV-compatible cluster tool
Rahim, A I Abdul, Marsh, C D, Ashburn, P and Booker, G R (1997) Improved control of polysilicon emitter interfacial oxide using a UHV-compatible cluster tool. Proceedings of 5th IEEE Workshop on High Performance Electron Devices for Microwave and Optoelectronic Applications , 232-236.
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| Item Type: | Conference or Workshop Item (UNSPECIFIED) |
|---|---|
| ISBNs: | 078034135 |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 250923 |
| Date Deposited: | 01 Oct 1999 |
| Last Modified: | 02 Mar 2012 12:18 |
| Contributors: | Rahim, A I Abdul (Author) Marsh, C D (Author) Ashburn, P (Author) Booker, G R (Author) |
| Date: | 1997 |
| Status: | Published |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/250923 |
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