LPCVD growth of SiGe for device applications


Bonar, J M, Parker, G J, Hamel, J S and Ashburn, P (1994) LPCVD growth of SiGe for device applications.

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Item Type: Other
Divisions: Faculty of Physical and Applied Science > Electronics and Computer Science > NANO
Item ID: 250945
Date Deposited: 04 Oct 1999
Last Modified: 02 Mar 2012 13:17
Contributors: Bonar, J M (Author)
Parker, G J (Author)
Hamel, J S (Author)
Ashburn, P (Author)
Date: 1994
Status: Published
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/250945

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