Optimisation of BF2 implanted pnp polysilicon emitter bipolar transistors using rapid thermal annealing


Moiseiwitsch, N E and Ashburn, P (1993) Optimisation of BF2 implanted pnp polysilicon emitter bipolar transistors using rapid thermal annealing. , 215-218.

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Item Type: Other
Additional Information: Organisation: ESSDERC
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 250962
Date Deposited: 05 Oct 1999
Last Modified: 27 Mar 2014 19:52
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/250962

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