A Scanning Electron Beam Annealer with Electrostatic Deflection Systems


Hart, M J and Evans, A G R (1985) A Scanning Electron Beam Annealer with Electrostatic Deflection Systems. Journal of Physics, E, 18, 303-306.

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Item Type: Other
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 250991
Date Deposited: 08 Oct 1999
Last Modified: 27 Mar 2014 19:52
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/250991

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