The Effect of Deposition of Temperature on LPCVD Polysilicon


French, P J and Evans, A G R (1986) The Effect of Deposition of Temperature on LPCVD Polysilicon. Electron.Letts, 22, (13), 716-718.

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Item Type: Other
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 250996
Date Deposited: 08 Oct 1999
Last Modified: 27 Mar 2014 19:52
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/250996

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