Rapid thermal processing in semiconductor technology

Hart, M J and Evans, A G R (1988) Rapid thermal processing in semiconductor technology. Semicond.Sci Technol, 3, 421-436.


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Item Type: Other
Divisions : Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 251006
Accepted Date and Publication Date:
Date Deposited: 11 Oct 1999
Last Modified: 27 Mar 2014 19:52
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/251006

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