The effects of RTA on CMOS devices


Murray, D C, Evans, A G R, Atrip, J L and Carter, J C (1990) The effects of RTA on CMOS devices. Sci&Technol, 759-764.

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Item Type: Other
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 251024
Date Deposited: 11 Oct 1999
Last Modified: 27 Mar 2014 19:52
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/251024

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