The effects of RTA on CMOS devices
Murray, D C, Evans, A G R, Atrip, J L and Carter, J C (1990) The effects of RTA on CMOS devices. Sci&Technol, 759-764.
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| Item Type: | Other |
|---|---|
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 251024 |
| Date Deposited: | 11 Oct 1999 |
| Last Modified: | 02 Mar 2012 12:57 |
| Contributors: | Murray, D C (Author) Evans, A G R (Author) Atrip, J L (Author) Carter, J C (Author) |
| Date: | 1990 |
| Status: | Published |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/251024 |
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