Nanometrological Micromachined Artefacts

Ensell, G, Evans, A G R, Farooqui, MM, Haycocks, J A and Stedman, M (1992) Nanometrological Micromachined Artefacts. Journal of Micromechanics and Microengineering, 2, (3), 179-180.


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Item Type: Other
Divisions : Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 251042
Accepted Date and Publication Date:
Date Deposited: 11 Oct 1999
Last Modified: 27 Mar 2014 19:52
Further Information:Google Scholar

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