Anomalous Electrical deactivation of low concentration rapid thermally annealed arsenic implanted silicon
Altrip, J L and Evans, A G R (1992) Anomalous Electrical deactivation of low concentration rapid thermally annealed arsenic implanted silicon. 19, 367-370.
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| Item Type: | Other |
|---|---|
| Additional Information: | Proceedings of 22 European Solid State Device Research Conference published in Microelectronic Engineering. |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 251052 |
| Date Deposited: | 11 Oct 1999 |
| Last Modified: | 02 Mar 2012 11:37 |
| Contributors: | Altrip, J L (Author) Evans, A G R (Author) |
| Date: | 1992 |
| Additional Information: | Proceedings of 22 European Solid State Device Research Conference published in Microelectronic Engineering. |
| Status: | Published |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/251052 |
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