Microfabrication of submicron nozzles in silicon nitride


Farooqui, M M and Evans, A G R (1992) Microfabrication of submicron nozzles in silicon nitride. IEEE/ASME Journal of Microelectromechanical Systems, 1, (2), 86-88.

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Item Type: Other
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 251057
Date Deposited: 11 Oct 1999
Last Modified: 27 Mar 2014 19:52
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/251057

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