Microfabrication of submicron nozzles in silicon nitride
Farooqui, M M and Evans, A G R (1992) Microfabrication of submicron nozzles in silicon nitride. IEEE/ASME Journal of Microelectromechanical Systems, 1, (2), 86-88.
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| Item Type: | Other |
|---|---|
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 251057 |
| Date Deposited: | 11 Oct 1999 |
| Last Modified: | 01 Mar 2012 10:22 |
| Contributors: | Farooqui, M M (Author) Evans, A G R (Author) |
| Date: | 1992 |
| Status: | Published |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/251057 |
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