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Using the metal-oxide polysilicon-silicon (MOPS) structure to determine LPCVD polysilicon quality

Using the metal-oxide polysilicon-silicon (MOPS) structure to determine LPCVD polysilicon quality
Using the metal-oxide polysilicon-silicon (MOPS) structure to determine LPCVD polysilicon quality
Carter, J.C.
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Evans, A.G.R.
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Throngnumchai, K.
d216a0ad-acb5-44cb-84be-53bf9f150253
Carter, J.C.
6a4e2120-5d03-4621-9ebc-ba8901e40e7a
Evans, A.G.R.
c4a3f208-8fd9-491d-870f-ce7eef943311
Throngnumchai, K.
d216a0ad-acb5-44cb-84be-53bf9f150253

Carter, J.C., Evans, A.G.R. and Throngnumchai, K. (1993) Using the metal-oxide polysilicon-silicon (MOPS) structure to determine LPCVD polysilicon quality.

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More information

Published date: 1993
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 251059
URI: http://eprints.soton.ac.uk/id/eprint/251059
PURE UUID: b228b47b-da1d-4ed6-9578-9ba4f196b1c1

Catalogue record

Date deposited: 11 Oct 1999
Last modified: 10 Dec 2021 20:19

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Contributors

Author: J.C. Carter
Author: A.G.R. Evans
Author: K. Throngnumchai

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