Using the metal-oxide polysilicon-silicon (MOPS) structure to determine LPCVD polysilicon quality


Carter, J C, Evans, A G R and Throngnumchai, K (1993) Using the metal-oxide polysilicon-silicon (MOPS) structure to determine LPCVD polysilicon quality. Applied Surface Science, 63, 281-284.

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Item Type: Other
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 251059
Date Deposited: 11 Oct 1999
Last Modified: 27 Mar 2014 19:52
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/251059

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