Using the metal-oxide polysilicon-silicon (MOPS) structure to determine LPCVD polysilicon quality
Carter, J C, Evans, A G R and Throngnumchai, K (1993) Using the metal-oxide polysilicon-silicon (MOPS) structure to determine LPCVD polysilicon quality. Applied Surface Science, 63, 281-284.
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| Item Type: | Other |
|---|---|
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 251059 |
| Date Deposited: | 11 Oct 1999 |
| Last Modified: | 02 Mar 2012 13:39 |
| Contributors: | Carter, J C (Author) Evans, A G R (Author) Throngnumchai, K (Author) |
| Date: | 1993 |
| Status: | Published |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/251059 |
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