Silicon MBE and submicron lithography state of the art 1984 Canadian conference on VLSI


Parker, Dr G J (1984) Silicon MBE and submicron lithography state of the art 1984 Canadian conference on VLSI.

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Item Type: Other
Additional Information: Organisation: Edmonton, Canada 1984
Divisions: Faculty of Physical and Applied Science > Electronics and Computer Science > NANO
Item ID: 251061
Date Deposited: 11 Oct 1999
Last Modified: 01 Mar 2012 10:22
Contributors: Parker, Dr G J (Author)
Date: 1984
Additional Information: Organisation: Edmonton, Canada 1984
Status: Published
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/251061

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