Silicon sensors with integral tips for atomic force microscopy: a novel single-mask fabrication process
Farooqui, M M and Evans, Alan G R (1993) Silicon sensors with integral tips for atomic force microscopy: a novel single-mask fabrication process. Journal of micromechanics and microengineering, 3, (1), 8-12.
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| Item Type: | Other |
|---|---|
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 251154 |
| Date Deposited: | 12 Oct 1999 |
| Last Modified: | 01 Mar 2012 10:23 |
| Contributors: | Farooqui, M M (Author) Evans, Alan G R (Author) |
| Date: | 1993 |
| Status: | Published |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/251154 |
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