Silicon sensors with integral tips for atomic force microscopy: a novel single-mask fabrication process


Farooqui, M M and Evans, Alan G R (1993) Silicon sensors with integral tips for atomic force microscopy: a novel single-mask fabrication process. Journal of micromechanics and microengineering, 3, (1), 8-12.

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Item Type: Other
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 251154
Date Deposited: 12 Oct 1999
Last Modified: 27 Mar 2014 19:52
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/251154

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