Micromachined silicon sensors for atomic force microscopy
Farooqui, M M, Evans, A G R, Stedman, M and Haycocks, J (1992) Micromachined silicon sensors for atomic force microscopy. Nanotechnology, 3, 91-97.
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| Item Type: | Other |
|---|---|
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 251157 |
| Date Deposited: | 12 Oct 1999 |
| Last Modified: | 02 Mar 2012 12:38 |
| Contributors: | Farooqui, M M (Author) Evans, A G R (Author) Stedman, M (Author) Haycocks, J (Author) |
| Date: | 1992 |
| Status: | Published |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/251157 |
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