Electrical stressing of submicrometer MOSFETS with raised source/drain structures realised by selective epitaxial growth of silicon using silane


Waite, A, Evans, A G R and Afshar-Hanaii, N (1994) Electrical stressing of submicrometer MOSFETS with raised source/drain structures realised by selective epitaxial growth of silicon using silane. Electronics letter, 30, (17), 1455-1456.

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Item Type: Other
Divisions: Faculty of Physical and Applied Science > Electronics and Computer Science > NANO
Item ID: 251158
Date Deposited: 12 Oct 1999
Last Modified: 02 Mar 2012 12:57
Contributors: Waite, A (Author)
Evans, A G R (Author)
Afshar-Hanaii, N (Author)
Date: 1994
Status: Published
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/251158

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