Micromachined silicon cantilever paddles with piezoresistive readout for flow sensing
Su, Y, Evans, A G R and Brunnschweiler, A (1996) Micromachined silicon cantilever paddles with piezoresistive readout for flow sensing. J.Micromech.Microeng, 6, 69-72.
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| Item Type: | Other |
|---|---|
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 251166 |
| Date Deposited: | 13 Oct 1999 |
| Last Modified: | 02 Mar 2012 13:17 |
| Contributors: | Su, Y (Author) Evans, A G R (Author) Brunnschweiler, A (Author) |
| Date: | 1996 |
| Status: | Published |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/251166 |
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