Micromachined silicon cantilever paddles with piezoresistive readout for flow sensing


Su, Y, Evans, A G R and Brunnschweiler, A (1996) Micromachined silicon cantilever paddles with piezoresistive readout for flow sensing. J.Micromech.Microeng, 6, 69-72.

Download

Full text not available from this repository.

Item Type: Other
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 251166
Date Deposited: 13 Oct 1999
Last Modified: 27 Mar 2014 19:52
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/251166

Actions (login required)

View Item View Item