Fabrication of improved piezoresitive Si cantilever probes for the atomic force microscope
Su, Y, Evans, A G R, Brunnschweiler, A, Ensell, G and Koch, M (1997) Fabrication of improved piezoresitive Si cantilever probes for the atomic force microscope. Sensors and Actuators, A60, 163-167.
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| Item Type: | Other |
|---|---|
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 251168 |
| Date Deposited: | 13 Oct 1999 |
| Last Modified: | 02 Mar 2012 12:57 |
| Contributors: | Su, Y (Author) Evans, A G R (Author) Brunnschweiler, A (Author) Ensell, G (Author) Koch, M (Author) |
| Date: | 1997 |
| Status: | Published |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/251168 |
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