Fabrication of improved piezoresitive Si cantilever probes for the atomic force microscope


Su, Y, Evans, A G R, Brunnschweiler, A, Ensell, G and Koch, M (1997) Fabrication of improved piezoresitive Si cantilever probes for the atomic force microscope. Sensors and Actuators, A60, 163-167.

Download

Full text not available from this repository.

Item Type: Other
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 251168
Date Deposited: 13 Oct 1999
Last Modified: 27 Mar 2014 19:52
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/251168

Actions (login required)

View Item View Item