Simulation and fabrication of micromachined cantilever valves


Koch, M, Evans, A G R and Brunnschweiler, A (1997) Simulation and fabrication of micromachined cantilever valves. Sensors and Actuators, A62, (1-3), 755-756.

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Item Type: Other
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 251169
Date Deposited: 13 Oct 1999
Last Modified: 27 Mar 2014 19:52
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/251169

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