The University of Southampton
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Photoresist parabolas for curved micromirrors

Photoresist parabolas for curved micromirrors
Photoresist parabolas for curved micromirrors
University of Southampton
Rotich, S.K.
b9ca8cc6-c15a-43fd-8838-49c4376ee4fb
Smith, J.G.
e6dd8bc8-de64-4d4e-8856-0b4f8587f122
Evans, A.G.R.
c4a3f208-8fd9-491d-870f-ce7eef943311
Brunnschweiller, A.
d53f9e21-88c8-4921-9beb-28451515b278
Rotich, S.K.
b9ca8cc6-c15a-43fd-8838-49c4376ee4fb
Smith, J.G.
e6dd8bc8-de64-4d4e-8856-0b4f8587f122
Evans, A.G.R.
c4a3f208-8fd9-491d-870f-ce7eef943311
Brunnschweiller, A.
d53f9e21-88c8-4921-9beb-28451515b278

Rotich, S.K., Smith, J.G., Evans, A.G.R. and Brunnschweiller, A. (1998) Photoresist parabolas for curved micromirrors.

Record type: Other

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More information

Published date: 1998
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 251184
URI: http://eprints.soton.ac.uk/id/eprint/251184
PURE UUID: b8f2cb77-bf7d-4f80-a4a4-c6a544a0cddd

Catalogue record

Date deposited: 15 Oct 1999
Last modified: 07 Jan 2022 21:08

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Contributors

Author: S.K. Rotich
Author: J.G. Smith
Author: A.G.R. Evans
Author: A. Brunnschweiller

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