Photoresist parbolas for curved micromirrors
Rotich, S K, Smith, J G, Evans, A G R and Brunnschweiller, A (1998) Photoresist parbolas for curved micromirrors. J Micromech Microeng, 108-110.
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| Item Type: | Other |
|---|---|
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 251184 |
| Date Deposited: | 15 Oct 1999 |
| Last Modified: | 02 Mar 2012 13:39 |
| Contributors: | Rotich, S K (Author) Smith, J G (Author) Evans, A G R (Author) Brunnschweiller, A (Author) |
| Date: | 1998 |
| Status: | Published |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/251184 |
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