Thick-film printed PZT actuator and polymer masking layers for micromachined silicon devices
Beeby, SP and White, NM (1999) Thick-film printed PZT actuator and polymer masking layers for micromachined silicon devices. Proceedings of Sensors and their Applications X Institute of Physics Publishing, 131-136.
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| Item Type: | Conference or Workshop Item (UNSPECIFIED) |
|---|---|
| ISBNs: | 0750306254 |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > EEE |
| Item ID: | 251207 |
| Date Deposited: | 21 Oct 1999 |
| Last Modified: | 01 Mar 2012 10:23 |
| Contributors: | Beeby, SP (Author) White, NM (Author) |
| Date: | September 1999 |
| Status: | Published |
| Publisher: | Institute of Physics Publishing |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/251207 |
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