Silicon micromachining processes combined with thick-film printed PZT actuators for MicroElectroMechanical systems
Beeby, SP, Blackburn, A and White, NM (1999) Silicon micromachining processes combined with thick-film printed PZT actuators for MicroElectroMechanical systems. Materials Letters, 40, 187-91.
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| Item Type: | Article |
|---|---|
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > EEE |
| Item ID: | 251210 |
| Date Deposited: | 26 Oct 1999 |
| Last Modified: | 02 Mar 2012 13:39 |
| Contributors: | Beeby, SP (Author) Blackburn, A (Author) White, NM (Author) |
| Date: | October 1999 |
| Status: | Published |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/251210 |
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