Beeby, SP, Blackburn, A and White, NM (1999) Processing of PZT piezoelectric thick-films on silicon for microelectromechanical systems. Journal of Micromechanics and Microengineering, 9 (3), 218-29.
Record type:
Article
This record has no associated files available for download.
More information
Published date: 1999
Organisations:
EEE
Identifiers
Local EPrints ID: 251211
URI: http://eprints.soton.ac.uk/id/eprint/251211
ISSN: 0960-1317
PURE UUID: ec04e35a-3aab-4f44-8c3c-4fcd22a3160c
Catalogue record
Date deposited: 21 Oct 1999
Last modified: 08 Jan 2022 02:39
Export record
Contributors
Author:
SP Beeby
Author:
A Blackburn
Author:
NM White
Download statistics
Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.