Enhanced pattern area density proximity effect correction
Ea, C.S. and Brown, A.D. (1999) Enhanced pattern area density proximity effect correction. Journal of Vacuum Science & Technology B, B 17, (2), 323-333.
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Description/Abstract
In this article, we describve and analyze the sources of correction error in the pattern area density proximity effect correction (PADPEC) method of Murai et al [F. Murai, H. Yoda, S. Okazaki, N Saitou and Y. Sakatini, J. Vac. Sci. Technol. B 10, 3072 (1992)]. By focussing on the dominant contribution to the overall error, we are able to enhance the technique further, developing the enhanced PADPEC, or EPADPEC method. EPADPEC further reduces linewidth errors by factors ranging from 4 to 11, while increasing the computation time by a factor of only 1.23. [Migrating EPADPEC to a dedicated (parallel) environment will enable the data throughput to be dramatically increased.]
| Item Type: | Other |
|---|---|
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > EEE |
| ePrint ID: | 251291 |
| Deposited On: | 27 Oct 1999 |
| Last Modified: | 02 Mar 2012 11:56 |
| Further Information: | Google Scholar |
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