A novel thick-film PZT/micromachined silicon accelerometer


Beeby, SP, Ross, JN and White, NM (1999) A novel thick-film PZT/micromachined silicon accelerometer. Electronics Letters, 25, (23), 2060-62.

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Item Type: Article
Divisions: Faculty of Physical and Applied Science > Electronics and Computer Science > EEE
Item ID: 251293
Date Deposited: 24 Oct 2000
Last Modified: 01 Mar 2012 10:24
Contributors: Beeby, SP (Author)
Ross, JN (Author)
White, NM (Author)
Date: November 1999
Status: Published
Publisher: IEE
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/251293

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