A polysilicon pressure sensor
Evans, A G R and Farooqui, M M (1986) A polysilicon pressure sensor.
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| Item Type: | Other |
|---|---|
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 252034 |
| Date Deposited: | 30 Nov 1999 |
| Last Modified: | 01 Mar 2012 10:27 |
| Contributors: | Evans, A G R (Author) Farooqui, M M (Author) |
| Date: | December 1986 |
| Status: | Published |
| Publisher: | IOP meeting on silicon based sensors, London |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/252034 |
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