A polysilicon pressure sensor

Evans, A G R and Farooqui, M M (1986) A polysilicon pressure sensor.


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Item Type: Other
Divisions : Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 252034
Accepted Date and Publication Date:
December 1986Published
Date Deposited: 30 Nov 1999
Last Modified: 27 Mar 2014 19:53
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/252034

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