Polysilicon diaphragms for sensor applications
Farooqui, M M, Roberts, P T E and Evans, A G R (1988) Polysilicon diaphragms for sensor applications. Silicon and other materials in the Solid State
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| Item Type: | Other |
|---|---|
| Additional Information: | Address: Southampton |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 252041 |
| Date Deposited: | 30 Nov 1999 |
| Last Modified: | 02 Mar 2012 12:57 |
| Contributors: | Farooqui, M M (Author) Roberts, P T E (Author) Evans, A G R (Author) |
| Date: | March 1988 |
| Additional Information: | Address: Southampton |
| Status: | Published |
| Publisher: | ITT Colloquium Sensor Update |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/252041 |
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