Farooqui, M M, Roberts, P T E and Evans, A G R (1988) Polysilicon diaphragms for sensor applications.
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Published date: March 1988
Additional Information:
Address: Southampton
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 252041
URI: http://eprints.soton.ac.uk/id/eprint/252041
PURE UUID: 91fd175d-9c97-4634-af58-815865f597a6
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Date deposited: 30 Nov 1999
Last modified: 10 Dec 2021 20:24
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Contributors
Author:
M M Farooqui
Author:
P T E Roberts
Author:
A G R Evans
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