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Polysilicon capacitative pressure sensors

Polysilicon capacitative pressure sensors
Polysilicon capacitative pressure sensors
NPL
Farooqui, M M
1c0f9c64-a0a1-4759-a5de-492f142547ae
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311
Farooqui, M M
1c0f9c64-a0a1-4759-a5de-492f142547ae
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311

Farooqui, M M and Evans, A G R (1988) Polysilicon capacitative pressure sensors.

Record type: Other

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More information

Published date: November 1988
Additional Information: Originally also catalogued with an incorrect 1998 publication year at https://eprints.soton.ac.uk/252043/
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 252043
URI: http://eprints.soton.ac.uk/id/eprint/252043
PURE UUID: afa24d13-50c0-48f2-9b93-6baf3e1dad82

Catalogue record

Date deposited: 30 Nov 1999
Last modified: 20 Nov 2023 17:42

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Contributors

Author: M M Farooqui
Author: A G R Evans

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