Fabrication of polysilicon diaphragms and allied structures
Farooqui, M M, Roberts, P TE and Evans, A G R (1989) Fabrication of polysilicon diaphragms and allied structures.
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| Item Type: | Other |
|---|---|
| Additional Information: | Address: London |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 252067 |
| Date Deposited: | 09 Dec 1999 |
| Last Modified: | 02 Mar 2012 12:57 |
| Contributors: | Farooqui, M M (Author) Roberts, P TE (Author) Evans, A G R (Author) |
| Date: | February 1989 |
| Additional Information: | Address: London |
| Status: | Published |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/252067 |
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