Micromachined sensors for atomic force microscopy


Farooqui, M M, Evans, A G R, Stedman, M and Haycocks, J A (1991) Micromachined sensors for atomic force microscopy. Sensors technology, systems and applications, 373-378.

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Item Type: Other
Additional Information: Address: Bristol
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 252245
Date Deposited: 07 Jan 2000
Last Modified: 27 Mar 2014 19:54
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/252245

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