A novel process for fabricating force sensors for atomic force microscopy


Farooqui, M M and Evans, A G R (1992) A novel process for fabricating force sensors for atomic force microscopy. MRS Symposia Proceedings, 276, 253-263.

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Item Type: Other
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 252433
Date Deposited: 28 Jan 2000
Last Modified: 27 Mar 2014 19:54
Publisher: MRS Symposia Proceedings
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/252433

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