Silicon Micromachining and fabrication


Evans, A G R (1993) Silicon Micromachining and fabrication.

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Item Type: Other
Additional Information: Address: Southammpton
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 252436
Date Deposited: 28 Jan 2000
Last Modified: 27 Mar 2014 19:54
Publisher: MICG
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/252436

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