Silicon Micromachining and fabrication
Evans, A G R (1993) Silicon Micromachining and fabrication.
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| Item Type: | Other |
|---|---|
| Additional Information: | Address: Southammpton |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 252436 |
| Date Deposited: | 28 Jan 2000 |
| Last Modified: | 01 Mar 2012 10:30 |
| Contributors: | Evans, A G R (Author) |
| Date: | 1993 |
| Additional Information: | Address: Southammpton |
| Status: | Published |
| Publisher: | MICG |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/252436 |
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