Silicon Micromachining and fabrication

Evans, A G R (1993) Silicon Micromachining and fabrication.


Full text not available from this repository.

Item Type: Other
Additional Information: Address: Southammpton
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 252436
Date :
Date Event
Date Deposited: 28 Jan 2000
Last Modified: 27 Mar 2014 19:54
Further Information:Google Scholar

Actions (login required)

View Item View Item