Micromahined silicon cantilever paddles for flow sensors
Su, Y, Evans, A G R and Brunnschweiler, A (2000) Micromahined silicon cantilever paddles for flow sensors. , 100-103.
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| Item Type: | Other |
|---|---|
| Additional Information: | Micromechanics Europe 1995 Proceedings. |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 252438 |
| Date Deposited: | 28 Jan 2000 |
| Last Modified: | 02 Mar 2012 12:57 |
| Contributors: | Su, Y (Author) Evans, A G R (Author) Brunnschweiler, A (Author) |
| Date: | 28 January 2000 |
| Additional Information: | Micromechanics Europe 1995 Proceedings. |
| Status: | Unpublished |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/252438 |
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