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Micromachined silicon cantilever paddles for flow sensors

Micromachined silicon cantilever paddles for flow sensors
Micromachined silicon cantilever paddles for flow sensors
Su, Y.
d9db9af4-ecb1-497f-ba4c-f11afbc2a934
Evans, A.G.R.
c4a3f208-8fd9-491d-870f-ce7eef943311
Brunnschweiler, A.
2d39ef7c-b95e-476c-b435-316b6618a565
Su, Y.
d9db9af4-ecb1-497f-ba4c-f11afbc2a934
Evans, A.G.R.
c4a3f208-8fd9-491d-870f-ce7eef943311
Brunnschweiler, A.
2d39ef7c-b95e-476c-b435-316b6618a565

Su, Y., Evans, A.G.R. and Brunnschweiler, A. (2000) Micromachined silicon cantilever paddles for flow sensors. In Micromechanics Europe 1995 Proceedings.

Record type: Conference or Workshop Item (Paper)

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More information

Published date: 28 January 2000
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 252438
URI: http://eprints.soton.ac.uk/id/eprint/252438
PURE UUID: 9799baed-2a2d-4102-a86e-59aa95c1bb98

Catalogue record

Date deposited: 28 Jan 2000
Last modified: 12 Dec 2021 03:28

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Contributors

Author: Y. Su
Author: A.G.R. Evans
Author: A. Brunnschweiler

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