Micromahined silicon cantilever paddles for flow sensors


Su, Y, Evans, A G R and Brunnschweiler, A (2000) Micromahined silicon cantilever paddles for flow sensors. , 100-103.

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Item Type: Other
Additional Information: Micromechanics Europe 1995 Proceedings.
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 252438
Date Deposited: 28 Jan 2000
Last Modified: 27 Mar 2014 19:54
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/252438

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