Simulation and fabrication of micromachined cantilever valves


Koch, M, Evans, A G R and Brunnschweiler, A (1996) Simulation and fabrication of micromachined cantilever valves.

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Item Type: Other
Additional Information: Eurosensors X Conference. Address: Leuven, Belgium
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 252439
Date Deposited: 28 Jan 2000
Last Modified: 27 Mar 2014 19:54
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/252439

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