Simulation and fabrication of micromachined cantilever valves
Koch, M, Evans, A G R and Brunnschweiler, A (1996) Simulation and fabrication of micromachined cantilever valves.
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| Item Type: | Other |
|---|---|
| Additional Information: | Eurosensors X Conference. Address: Leuven, Belgium |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 252439 |
| Date Deposited: | 28 Jan 2000 |
| Last Modified: | 02 Mar 2012 12:19 |
| Contributors: | Koch, M (Author) Evans, A G R (Author) Brunnschweiler, A (Author) |
| Date: | September 1996 |
| Additional Information: | Eurosensors X Conference. Address: Leuven, Belgium |
| Status: | Published |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/252439 |
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