Micromachined Flow Sensors by using Piezoresisitive Cantilever Paddle


Su, Y, Evans, A G R, Brunnschweiler, A and Ensell, G (1996) Micromachined Flow Sensors by using Piezoresisitive Cantilever Paddle.

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Item Type: Other
Additional Information: ESSDERC 96 26th European Solid State Device Research Conference. Address: Bologna, Italy
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 252440
Date Deposited: 28 Jan 2000
Last Modified: 27 Mar 2014 19:54
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/252440

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