Micromachined Flow Sensors by using Piezoresisitive Cantilever Paddle
Su, Y, Evans, A G R, Brunnschweiler, A and Ensell, G (1996) Micromachined Flow Sensors by using Piezoresisitive Cantilever Paddle.
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| Item Type: | Other |
|---|---|
| Additional Information: | ESSDERC 96 26th European Solid State Device Research Conference. Address: Bologna, Italy |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 252440 |
| Date Deposited: | 28 Jan 2000 |
| Last Modified: | 02 Mar 2012 11:56 |
| Contributors: | Su, Y (Author) Evans, A G R (Author) Brunnschweiler, A (Author) Ensell, G (Author) |
| Date: | September 1996 |
| Additional Information: | ESSDERC 96 26th European Solid State Device Research Conference. Address: Bologna, Italy |
| Status: | Published |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/252440 |
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