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Processing and modelling of micromachined cantilever valves

Processing and modelling of micromachined cantilever valves
Processing and modelling of micromachined cantilever valves
We have fabricated and simulated micromachined cantilever valves. For processing, bulk micromachining and silicon fusion bonding of a duct-containing-wafer and a flap-maintaining-wafer are used. After the release of the cantilever with buflered HF a rinse in Toluene avoids stiction. Measurements revealed a good forward to reverse flow rate ratio, where leakage rates were below 1 µl min-1. Static simulations were done by coupling mechanical (ANSYS) and fluidic (FLOWSD) simulators. The modelling results were in good agreement with measured results and give confidence in this simulator. Dynamic simulations were realized with an impact model of the cantilever sitting on top of the duct. A lumped system was used together with measured results of the measured frequency and the quality factor of a cantilever in water.
Institution of Electrical Engineers
Koch, M
afb525c3-6353-4bac-93f6-a77de2881db7
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311
Brunnschweiler, A
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Koch, M
afb525c3-6353-4bac-93f6-a77de2881db7
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311
Brunnschweiler, A
2d39ef7c-b95e-476c-b435-316b6618a565

Koch, M, Evans, A G R and Brunnschweiler, A (1996) Processing and modelling of micromachined cantilever valves. In IEE Colloquium on Microengineered Components for Fluids (Digest No. 1996/176). Institution of Electrical Engineers.. (doi:10.1049/ic:19961017).

Record type: Conference or Workshop Item (Paper)

Abstract

We have fabricated and simulated micromachined cantilever valves. For processing, bulk micromachining and silicon fusion bonding of a duct-containing-wafer and a flap-maintaining-wafer are used. After the release of the cantilever with buflered HF a rinse in Toluene avoids stiction. Measurements revealed a good forward to reverse flow rate ratio, where leakage rates were below 1 µl min-1. Static simulations were done by coupling mechanical (ANSYS) and fluidic (FLOWSD) simulators. The modelling results were in good agreement with measured results and give confidence in this simulator. Dynamic simulations were realized with an impact model of the cantilever sitting on top of the duct. A lumped system was used together with measured results of the measured frequency and the quality factor of a cantilever in water.

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More information

Published date: October 1996
Additional Information: IEE Colloquium on Microengineered Components for Fluids 29-29 October 1996 London, UK
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 252441
URI: http://eprints.soton.ac.uk/id/eprint/252441
PURE UUID: af0ac91b-7e29-4221-b73c-34fb6fc57712

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Date deposited: 28 Jan 2000
Last modified: 09 Apr 2024 09:51

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Contributors

Author: M Koch
Author: A G R Evans
Author: A Brunnschweiler

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