Processing and modelling of micromachined cantilever valves


Koch, M, Evans, A G R and Brunnschweiler, A (1996) Processing and modelling of micromachined cantilever valves.

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Item Type: Other
Additional Information: Address: London
Divisions: Faculty of Physical and Applied Science > Electronics and Computer Science > NANO
Item ID: 252441
Date Deposited: 28 Jan 2000
Last Modified: 02 Mar 2012 11:37
Contributors: Koch, M (Author)
Evans, A G R (Author)
Brunnschweiler, A (Author)
Date: October 1996
Additional Information: Address: London
Status: Published
Publisher: Microengineered components for fluids IEE Colloquium
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/252441

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