Fabrication of improved piezoresistive Si cantilever probe for the atomic force microscope


Su, Y, Evans, A G R, Brunnschweiler, A and Ensell, G (1996) Fabrication of improved piezoresistive Si cantilever probe for the atomic force microscope.

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Item Type: Other
Additional Information: UK Scanned probe Microscopy Meeting. Address: St Johns College, Oxford
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 252442
Date Deposited: 28 Jan 2000
Last Modified: 27 Mar 2014 19:54
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/252442

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