Su, Y., Evans, A.G.R., Brunnschweiler, A. and Ensell, G.
Micro-cantilever resonance measured using sound excitation.
In, MME '97, Southampton,
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This paper describes sound-excited vibrations of a silicon cantilever resonator for measuring its resonant frequencies. A strain gauge resistor integrated in the cantilever is used as a sensing element. The experimental setup greatly simplifies the measurement system and is sensitive and easy to operate compared with optical sensing methods. The measured resonant frequencies of the micro-cantilever resonator are in good agreement with the theoretical predictions from FE modeling.
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