Micro-cantilever resonance measured using sound excitation
Su, Y., Evans, A.G.R., Brunnschweiler, A. and Ensell, G. (1997) Micro-cantilever resonance measured using sound excitation. In, MME '97, Southampton, , 140-143.
Full text not available from this repository.
This paper describes sound-excited vibrations of a silicon cantilever resonator for measuring its resonant frequencies. A strain gauge resistor integrated in the cantilever is used as a sensing element. The experimental setup greatly simplifies the measurement system and is sensitive and easy to operate compared with optical sensing methods. The measured resonant frequencies of the micro-cantilever resonator are in good agreement with the theoretical predictions from FE modeling.
|Item Type:||Conference or Workshop Item (Paper)|
|Divisions:||Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
|Date Deposited:||28 Jan 2000|
|Last Modified:||01 Jan 2016 21:23|
|Further Information:||Google Scholar|
|RDF:||RDF+N-Triples, RDF+N3, RDF+XML, Browse.|
Actions (login required)