Micro-cantilever resonance measured using sound excitation


Su, Y., Evans, A.G.R., Brunnschweiler, A. and Ensell, G. (1997) Micro-cantilever resonance measured using sound excitation. In, MME '97, Southampton, , 140-143.

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Description/Abstract

This paper describes sound-excited vibrations of a silicon cantilever resonator for measuring its resonant frequencies. A strain gauge resistor integrated in the cantilever is used as a sensing element. The experimental setup greatly simplifies the measurement system and is sensitive and easy to operate compared with optical sensing methods. The measured resonant frequencies of the micro-cantilever resonator are in good agreement with the theoretical predictions from FE modeling.

Item Type: Conference or Workshop Item (Paper)
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 252448
Date :
Date Event
September 1997Published
Date Deposited: 28 Jan 2000
Last Modified: 01 Jan 2016 21:23
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/252448

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