High-Aspect ratio silicon pillars fabricated by electrochemical etching and oxidation of macroporous silicon


Lau, H W, Parker, G J and Greef, R (1996) High-Aspect ratio silicon pillars fabricated by electrochemical etching and oxidation of macroporous silicon. Thin Solid Films, 276, 29 - 31.

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Item Type: Other
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 252489
Date Deposited: 31 Jan 2000
Last Modified: 27 Mar 2014 19:54
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/252489

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