An improved technology for elevated source/drain MOSFETS


Waite, A, Evans, A G R, Howard, D J, Meyer, K De, Caymax, M and Kubicek, S (1997) An improved technology for elevated source/drain MOSFETS. , 256-258.

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Item Type: Other
Additional Information: European Solid State Device Conference (ESSDERC) proceedings. Address: Stuttgart, Germany
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 252500
Date Deposited: 07 Feb 2000
Last Modified: 27 Mar 2014 19:54
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/252500

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